Physical Modulation Tuned Plasmonic Device

ABSTRACT

A plasmonic display device is provided that uses physical modulation mechanisms. The device is made from an electrically conductive bottom electrode and a first dielectric layer overlying the bottom electrode. The first dielectric layer is a piezoelectric material having an index of expansion responsive to an electric field. An electrically conductive top electrode overlies the first dielectric layer. A first plasmonic layer, including a plurality of discrete plasmonic particles, is interposed between the top and bottom electrodes and in contact with the first dielectric layer. In one aspect, the plasmonic particles are an expandable polymer material covered with a metal coating having a size responsive to an electric field.

RELATED APPLICATION

The application is a Divisional of an application entitled, PLASMONICDEVICE TUNED USING PHYSICAL MODULATION, invented by Hashimura et al.,Ser. No. 12/646,585, filed on Dec. 23, 2009, Attorney Docket No.SLA2686;

which is a Continuation-in-Part of a pending application entitled,PLASMONIC DEVICE TUNED USING LIQUID CRYSTAL MOLECULE DIPOLE CONTROL,invented by Tang et al., Ser. No. 12/635,349, filed on Dec. 10, 2009,Attorney Docket No. SLA2711;

which is a Continuation-in-Part of a pending application entitled.PLASMONIC DEVICE TUNED USING ELASTIC AND REFRACTIVE MODULATIONMECHANISMS, invented by Tang et al., Ser. No. 12/621,567, filed on Nov.19, 2009, Attorney Docket No. SLA2685;

which is a Continuation-in-Part of an application entitled,COLOR-TUNABLE PLASMONIC DEVICE WITH A PARTIALLY MODULATED REFRACTIVEINDEX, invented by Tang et al., Ser. No. 12/614,368, filed on Nov. 6,2009, now U.S. Pat. No. 8,045,107. All the above-referenced applicationsare incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention generally relates to electronic visual display devicesand, more particularly, to a color-tunable plasmonic display device thatrelies upon an physical modulation means.

2. Description of the Related Art

Reflective display or color-tunable device technology is attractiveprimarily because it consumes substantially less power than liquidcrystal displays (LCDs) and organic light emitting diode (OLED)displays. A typical LCD used in a laptop or cellular phone requiresinternal (backlight) illumination to render a color image. In mostoperating conditions the internal illumination that is required by thesedisplays is in constant competition with the ambient light of thesurrounding environment (e.g., sunlight or indoor overhead lighting).Thus, the available light energy provided by these surroundings iswasted, and in fact, the operation of these displays requires additionalpower to overcome this ambient light. In contrast, reflective displaytechnology makes good use of the ambient light and consumessubstantially less power.

A number of different reflective display technologies have beendeveloped, such as electrophoretic, electrowetting, electrochromicdisplays, and interference-based MEMS display. These displaytechnologies all have disadvantages or challenges that must be overcometo obtain greater commercial success. Many existing technologies relyupon phenomena that are intrinsically slow. For example, electrophoreticor electrochemical techniques typically require particles to drift ordiffuse through liquids over distances that create a slow response. Someother technologies require high power to operate at video rates. Forexample, many reflective displays must switch a large volume of materialor chromophores from one state to another to produce an adequate changein the optical properties of a pixel. At video switching rates, currentson the order of hundreds of mA/cm² are necessary if a unit charge mustbe delivered to each dye molecule to affect the change. Therefore,display techniques that rely on reactions to switch dye molecules demandunacceptably high currents for displaying video. The same holds true forelectrochromic displays.

A second challenge for reflective displays is the achievement of highquality color. In particular, most reflective display technologies canonly produce binary color (color/black) from one material set. To createa full color spectrum at least three sub-pixels, using differentmaterial sets, must be used when employing a side-by-side sub-pixelarchitecture with fixed colors. This limits the maximum reflected lightfor some colors to about ⅓, so that the pixels of this type cannotproduce saturated colors with a good contrast.

Some reflective displays face reliability problem over a long lifetime.In particular, to sustain video rate operation for a few years requiresat least billions of reversible changes in optical properties. Achievingthe desired number of cycles is particularly difficult in reflectivedisplays using techniques based on chemical reactions, techniques thatinvolve mixing and separation of particles, or MEMS technology thatinvolves repeated mechanic wear or electric stress.

FIG. 1 is a partial cross-sectional view of nanoplasmonic display inwhich the color tuning is accomplished by electrical modulation of therefractive index of an electro-optical material such as a liquid crystal(pending art). Details of the device 100 can be found in the pendingapplication entitled, COLOR-TUNABLE PLASMONIC DEVICE WITH A PARTIALLYMODULATED REFRACTIVE INDEX, invented by Tang et al., Ser. No.12/614,368. Because of the limited refractive index (n) change ofdielectric 106 materials such as liquid crystal, the color tuning rangeof a device using just this tuning modulation means is very limited.Thus, the device of FIG. 1 uses an additional color tuning mechanism, asdescribed below.

FIG. 2 is a graph simulating the relationship between resonantwavelength change and refractive index for a liquid crystal materialsurrounding an Ag nanoparticle with a diameter of 80 nanometers. Forexample, the highest birefringence liquid crystal commercially availableonly has a Δn of 0.3, which provides a tuning range of only 80 nm, basedon the simulation result in FIG. 2. Research labs have reported liquidcrystals with a Δn as high as 0.79, but the performance of suchmaterials is not guaranteed. Besides, these materials may not have theappropriate response time or threshold voltage required for thenanoplasmonic display application.

Retuning to FIG. 1, the color tuning range of a plasmonic device can beimproved with the addition of a second dielectric layer 104, which has arefractive index that is non-responsive to an electric field.

It would be advantageous if further improvements in the color range of aplasmonic device could be obtained by additional mechanisms, other thanchanging the refractive index of the dielectric materials.

SUMMARY OF THE INVENTION

The full range of colors produced by plasmon resonances resulting frommetal nanostructures has been known since ancient times as a means ofproducing stained colored glass. For instance, the addition of goldnanoparticles to otherwise transparent glass produces a deep red color.The creation of a particular color is possible because the plasmonresonant frequency is generally dependent upon the size, shape, materialcomposition of the metal nanostructure, as well as the dielectricproperties of the surroundings environment. Thus, the optical absorptionand scattering spectra (and therefore the color) of a metalnanostructure, can be varied by altering any one or more of thesecharacteristics.

The tuning of the refractive index of a surrounding dielectric materialsuch as liquid crystal may be limited by the material itself. Forexample, commercially available liquid crystal possesses a change in theindex of refraction of ˜0.3. For realizing a full color reflectivedisplay, a larger change in index of refraction may be needed, with morethan one pixel necessary to achieve the entire visual spectrum.

The full range of colors produced by plasmon resonances can be tuned notonly by changing the refractive index of the surrounding medium, butalso by altering the size and shape of nanoparticles. In one aspect,nanoparticles are embedded in a piezoelectric material. When theelectric field is applied between the top and bottom electrodes, a forceis applied perpendicular to the substrate, stretching the piezoelectricmaterial laterally. The size to which the embedded nanoparticles arestretched corresponds to the strength of the applied voltage (thelateral movement of the piezoelectric material). Some examples ofpiezoelectric materials include quartz, AlN, PZT, and ZnO. Alternately,the nanoparticles may be expanded and compressed by applying an electricfield to an expandable polymer nanoparticle, covered with a thin layerof metallic coating. The expandable particles can then be stretched orcompressed depending on the applied electric field.

Accordingly, a plasmonic display device is provided that uses physicalmodulation mechanisms. The device is made from an electricallyconductive bottom electrode and a first dielectric layer overlying thebottom electrode. The first dielectric layer is a piezoelectric materialhaving an index of expansion responsive to an electric field. Anelectrically conductive top electrode overlies the first dielectriclayer. A first plasmonic layer, including a plurality of discreteplasmonic particles, is interposed between the top and bottom electrodesand in contact with the first dielectric layer. Thus, the plasmonicparticles have a first average spacing between particles in response toa first electric field between the top and bottom electrodes, and asecond average spacing between particles in response to a secondelectric field.

In one aspect, the plasmonic particles are an expandable polymermaterial covered with a metal coating having a size responsive to anelectric field. That is, the plasmonic particles have a first averagesize in response to the first electric field between the top and bottomelectrodes, and a second average size in response to the second electricfield. For example, the plasmonic particle polymer material may beBaTiO₃ or poly vinylidene fluoride (PVDF).

Additional details of the above-described plasmonic display device, aswell as a method for creating colors in the visible spectrum using atunable plasmonic device with physical modulation mechanisms, areprovided below.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a partial cross-sectional view of nanoplasmonic display inwhich the color tuning is accomplished by electrical modulation of therefractive index of an electro-optical material such as a liquid crystal(pending art).

FIG. 2 is a graph simulating the relationship between resonantwavelength change and refractive index for a liquid crystal materialsurrounding an Ag nanoparticle with a diameter of 80 nanometers.

FIG. 3 is a partial cross-sectional view of a plasmonic display deviceusing physical modulation mechanisms.

FIG. 4 is a partial cross-sectional view of a first variation of theplasmonic display device of FIG. 3.

FIGS. 5A and 5B are partial cross-sectional views of the first plasmoniclayer of FIG. 3 or 4 in greater detail.

FIGS. 6A and 6B are partial cross-sectional views of a variation of thefirst plasmonic layer depicted in FIGS. 5A and 5B.

FIGS. 7A and 7B are plan views of the plasmonic layer of FIG. 3 or 4.

FIG. 8 is a partial cross-sectional view of a second variation of theplasmonic display device of FIG. 3.

FIG. 9 is a partial cross-sectional view of a variation of the plasmonicdisplay device of FIG. 8.

FIGS. 10A and 10B are partial cross-sectional views depicting a processfor color tuning the plasmonic device of FIG. 3.

FIG. 11 is a graph depicting the scattering spectrums for differentparticle sizes and shapes (prior art).

FIGS. 12A and 12B are partial cross-sectional views depicting a processfor color tuning the plasmonic device of FIG. 3, when the nanoparticlesare a composite shell.

FIGS. 13A and 13B are plots depicting the relationship betweenwavelength tunability and silica nanoparticles (prior art).

FIGS. 14A and 14B depict nanoparticles having a shell thickness, withcore radii of r and 2r, respectively.

FIG. 15 is a flowchart illustrating a method for creating colors in thevisible spectrum using a physical modulation plasmonic display device.

DETAILED DESCRIPTION

FIG. 3 is a partial cross-sectional view of a plasmonic display deviceusing physical modulation mechanisms. The device 300 comprises anelectrically conductive bottom electrode 302 and a first dielectriclayer 304 overlying the bottom electrode. The first dielectric layer 304is made from a piezoelectric material having an index of expansionresponsive to an electric field. An electrically conductive topelectrode 306 overlies the first dielectric layer 304. A first plasmoniclayer 308, including a plurality of discrete plasmonic particles 310, isinterposed between the top electrode 306 and the bottom electrode 302.The first plasmonic layer 308 is in contact with the first dielectriclayer 304. For example, the first dielectric may be a material such aslead zicronate titanate (PZT) or aluminium nitride (AlN). As shown inFIG. 3, the first plasmonic layer 308 is embedded in the firstdielectric layer 304.

In one aspect, the bottom electrode 302 and top electrode 306 aretransparent to a first range of wavelengths in the visible spectrum oflight, made from a material such as indium tin oxide (ITO) or ZnO. Inthis case, the device 300 is transmissive—accepting ambient (white)light and passing a tuned color. Since the metal nanoparticles reflectlight, the device may be considered both transmissive and reflective.That is, the device reflects a tuned color and passes another tunedcolor.

FIG. 4 is a partial cross-sectional view of a first variation of theplasmonic display device of FIG. 3. In this aspect the first plasmoniclayer 308 overlies the bottom electrode 302. The first dielectric layer304 overlies the first plasmonic layer particles 310 and exposed regions400 of the bottom electrode between the first plasmonic layer particles.

FIGS. 5A and 5B are partial cross-sectional views of the first plasmoniclayer of FIG. 3 or 4 in greater detail. As shown in FIG. 5A, theplasmonic particles 310 have a first average spacing 500 betweenparticles in response to a first electric field between the top andbottom electrodes, Note: since the spacing between particles need notnecessarily be uniform, the concept of an average spacing is introducedfor comparison under the influence of different strength electricfields. That is, the spacing between any two particles in the horizontalplane 504 varies in response to the strength of the electric field (thevoltage applied between the top and bottom electrodes). In FIG. 5B, asecond average spacing 502 exists between particles 310 in response to asecond electric field.

Alternately stated, the first dielectric material 304 has a first indexof expansion in response to the first electric field between the top andbottom electrodes, and a second index of expansion in response to thesecond electric field. As used herein, the index of expansion is relatedto the elasticity of a material, and ultimately defines the averagedistance between particles in the first dielectric material. Since it ispossible for the first dielectric material to contract with respect to areference condition, the expansion index may be understood to beexpressed with both positive and negative coefficients.

FIGS. 6A and 6B are partial cross-sectional views of a variation of thefirst plasmonic layer depicted in FIGS. 5A and 5B. In this aspect, theindex of expansion of the first dielectric 304 still varies as afunction of the electric field, so that the spacing between plasmonicparticles is affected, as described above in the explanation of FIGS. 5Aand 5B. The particles 310 in FIGS. 6A and 6B provide an additionalphysical modulation mechanism—change of size. That is, the plasmonicparticles 310 are an expandable polymer material 608 covered with ametal coating 610 having a size responsive to an electric field. In FIG.6A, the plasmonic particles 310 have a first average size 600 inresponse to a first electric field between the top and bottomelectrodes. In FIG. 6B, the particles 310 have a second average size 602in response to a second electric field. That is, the size of eachparticle varies in response to the strength of the electric field (thevoltage applied between the top and bottom electrodes). More explicitly,the size of the particles changes primarily in the radial direction ofthe particle surface (see FIGS. 14A and 14B). For example, the polymermaterial 608 may be BaTiO₃ or polyvinylidene fluoride (PVDF).

FIGS. 7A and 7B are plan views of the plasmonic layer of FIG. 3 or 4.Generally, the plasmonic particles 310 in the plasmonic layer 308 may bearranged in a random order or symmetrical array. In FIG. 7A, theparticles 310 are randomly distributed. Random order is defined as anon-uniform 3-D spacing between particles, in FIG. 7B the plasmonicparticles 310 are in a two-dimensional triangular array. The plasmonicparticles 310 in the first plasmonic layer 308 may be comprised of auniform particle structure (shape) or a plurality of different particlestructures. Some examples of particle structures include spherical,disk, composite shell, dome, egg, cup, rod, bar, pyramid, and star.Note: the composite shell structure may comprise a metal core surroundedby a dielectric shell, or a dielectric core surrounded by a metal shell,in one aspect, the composite shell dielectric may have a refractiveindex that varies in response to electric fields. Note: the device maybe enabled using other structures, as an exhaustive collection ofstructures and shapes in not shown.

Likewise, the plasmonic particles 310 in the first plasmonic layer mayhave a uniform size (diameter) or comprise a plurality of differentparticle sizes. Typically, the plasmonic particles 310 have a size 700in the range of 10 nanometers (nm) to 300 nm. Typically, the plasmonicparticles 310 have an average spacing 702 between particles, which is inthe range of about 700 nm, or less.

The plasmonic particles 310 in the first plasmonic layer may be made ofthe same material or a variety of different materials. Some examples ofplasmonic shell materials (610, see FIGS. 6A and 6B) include Ag, Au, Cu,Pt, Al, and alloys of the above-mentioned metals. Note: if two or moreplasmonic layers are used (as described below), the different layersneed not necessarily use the same plasmonic particles sizes, shapes,material, spacings, or ordering.

FIG. 8 is a partial cross-sectional view of a second variation of theplasmonic display device of FIG. 3. In this aspect, the device 300further comprises a second dielectric layer 800 overlying the firstdielectric layer 304. The second dielectric layer has a refractive indexthat may be either responsive or non-responsive to an electric field. Ifthe second dielectric layer 800 has a refractive index non-responsive toan electric field, it may be a material such as SiOx, SiNx, SiOxNy,MgF2, CaFa, SiOC, amorphous fluoropolymers, or organic polymers.However, this is not an exhaustive list of materials. It should beunderstood that although only a two dielectric layer structure is shown,the same principles can be applied to create devices with additionaldielectric layers. In this aspect, the plasmonic layer 308 is interposedbetween dielectric layers 304 and 800. Alternately but not shown, theplasmonic layer may be embedded in the first dielectric, as in FIG. 3,or interposed between the bottom electrode and first dielectric layer,as in FIG. 4.

If the second dielectric has an index of refraction responsive to anelectric field, it may be a material such as ferroelectric liquidcrystals, nematic liquid crystals, LiNbO3, Hg2Cl2, LiTaO3, BBO, KTP, ororganic electro-optical crystal 2,6-dibromo-N-methyl-4-nitroaniline.Otherwise, the material may be a liquid crystal elastomer orpolymer-networked liquid crystal. Typically, the second dielectric 800may have a refractive index that varies between 1.0 and 3, in anydirection, in response to an electric field. Since refractive index isdirection-dependent, the refractive index value may be defined as the“effective” value or “average” value, as well as the individualcomponent value (along a particular direction).

FIG. 9 is a partial cross-sectional view of a variation of the plasmonicdisplay device of FIG. 8. In this aspect the plasmonic display devicefurther comprises a second plasmonic layer 900 of plasmonic particles310 interposed between the first and second dielectric layers 304/800.Note: the particles in the two plasmonic layers may, or may not have thesame sizing, spacing, and organization. Likewise, the particles need notbe made from the same materials. In this aspect, the plasmonic layer 308is embedded in the first dielectric, as in FIG. 3. Alternately but notshown, the plasmonic layer may be interposed between the bottomelectrode and first dielectric layer, as in FIG. 4.

A number of different multilayer plasmonic devices may be formed bycombining the device structures shown in FIGS. 3 through 9.

Functional Description

Plasmons, which are quantized oscillations of the free electron gas in ametal or other material, affect how light interacts with a structure andthereby determine the apparent color of the structure. This phenomenongenerally occurs through the coupling of surface plasmons with light, toform surface plasmon-polaritons. Tuning the color of metalnanostructures is possible because the plasmon resonant frequency ofsuch structures generally depends on the size, shape, distance betweenplasmonic particles, and the dielectric properties of the surroundingmaterial. Thus, the optical absorption and scattering spectra (andtherefore the color) of metal structures can be varied by altering anyone or more of these characteristics.

FIGS. 10A and 10B are partial cross-sectional views depicting a processfor color tuning the plasmonic device of FIG. 3. Conventional colortunable, reflective displays using the plasmon resonance of metalliccomposite structures are realized by either changing the dielectricproperties of a medium in which the structures are embedded, or bychanging the spatial relationship of these structures. In the devicesdescribed in FIGS. 3 through 9, the physical size and shape of discreteparticles are altered through a stimulus, to tune the optical absorbanceand scattering spectra. As shown, the material of the medium ispiezoelectric, and the shapes of discrete particles are altered byapplying a voltage to the electrodes.

The expansion amount of each particle is related to the piezoelectriccoefficient of the material. For example, lead zicronate titanate (PZT)has piezoelectric coefficient of 3.0×10⁻¹⁰ m/V, and aluminum nitride(AlN) is 5×10⁻¹² m/V. When the excitation voltage is applied between thetop and bottom electrodes, the piezoelectric expands parallel to thesubstrate. With the physical expansion of the medium 304, the particles310 that are embedded will encounter strain and thus expand accordingly.The size and shape of particles determine the plasmon resonant frequency(color). Note: both the particle size and spacing between particles isaffected.

FIG. 11 is a graph depicting the scattering spectrums for differentparticle sizes and shapes (prior art). The graph shows the effect ofsize and shape on localized surface plasmon resonance (LS PR) extinctionspectrum for silver nanoprisms (represented as triangles) and nanodiscs(represented as circles) formed by nanosphere lithography.

FIGS. 12A and 12B are partial cross-sectional views depicting a processfor color tuning the plasmonic device of FIG. 3, when the nanoparticlesare a composite shell. As described in the explanation of FIGS. 6A and6B, the nanoparticles 310 may be composed of expandable polymers 608 andcovered with thin metal coating 610, which are resizable by applyingelectric field applied between the top and bottom conducting electrodes.Piezosensitive expandable polymers, such as BaTiO₃ and polyvinylidenefluoride (PVDF), are known to display high piezoelectricity afterapplying a high electric field. Such a polymer in nanoparticle form canbe coated with thin metal to have a plasmonic effect when the lightinteracts with the structures. When the electric field is appliedbetween the two conducting plates, the inner core polymer 608 expandsand contracts, changing the radius (size) of the particle. The particlescan be of any size or shape. As shown if FIGS. 12A and 12B, the polymercores 608 need not necessary be completely covered by the metal coatings610.

FIGS. 13A and 13B are plots depicting the relationship betweenwavelength tunability and silica nanoparticles (prior art). FIG. 13Ashows the results of altering the outer gold shell thickness from 3nanometers (nm) to 50 nm, for 50 nm core radius particles. FIG. 13Bshows the results of changing shell thickness from 5 nm to 40 nm, for a100 nm radius core. The graph results show that a change of 10 nm inshell thickness (from 10 nm to 20 nm thickness) can easily alter theoptical wavelength greater than 100 nm.

FIGS. 14A and 14B depict nanoparticles having a shell thickness, withcore radii of r and 2r, respectively. Extending the relationshipspresented in FIGS. 13A and 13B, expandable polymer can be implemented asthe inner core 608 of the particle 310. FIG. 14A is an example of apolymer nanoparticle with metal outer shell 610 that is at an originalstate with a polymer core radius of r. FIG. 14B depicts the expansion ofthe polymer core radius to 2r. When the particle size is expanded bytwice the initial radius, the surface area S of the particle increasesby four times the initial area, given by the following equation:

S=4πr ²

Considering the outer shell thickness of metal coating to be small, thechange in shell thickness due to the expansion of twice the size of theparticle (i.e. four times the surface area of the shell.) results inapproximately ¼ the initial, shell thickness, as given from thefollowing equation:

V _(shell) =t _(shell) ×S _(shell)

Returning to FIGS. 13A and 13B, the change in ¼ the shell thickness ofmetal coating implies that the optical wavelength can easily be tunedfrom the visible color range of green (550 nm) to red (700 nm) with onlytwice the radius expansion of inner core polymer. This large tuningrange is evidence that expandable plasmonic nanoparticles can beemployed in reflective color displays.

FIG. 15 is a flowchart illustrating a method for creating colors in thevisible spectrum using a physical modulation plasmonic display device.Although the method is depicted as a sequence of numbered steps forclarity, the numbering does not necessarily dictate the order of thesteps. It should be understood that in some aspects of the method thesesteps may be skipped, performed in parallel, or performed without therequirement of maintaining a strict order of sequence. Generallyhowever, the steps are performed in the numeric order. The method startsat Step 1500.

Step 1502 provides a plasmonic device with an electrically conductivebottom electrode, a first dielectric layer overlying the bottomelectrode, made from a piezoelectric material having an index ofexpansion responsive to an electric field, and an electricallyconductive top electrode overlying the second dielectric layer. Theplasmonic device also comprises a first plasmonic layer including aplurality of discrete plasmonic particles, interposed between the topand bottom electrodes and in contact with the first dielectric layer,Examples of plasmonic devices are presented in FIGS. 3-9, above.

Step 1504 accepts a full-spectrum visible light incident to the topelectrode. Step 1506 accepts a first voltage potential between the topand bottom electrodes, generating a first electric field. Step 1508creates a first index of expansion in the first dielectric layer inresponse to the first electric field. In response to the first index ofexpansion, Step 1510 creates a first average spacing between particlesin the first plasmonic layer. Step 1512 supplies a first primary colorin response to the first refractive index and the first average spacing,where a primary color exhibits a single wavelength peak with a spectralfull width at half magnitudes (FWHMs) in the visible spectrum of light.

Step 1514 accepts a second voltage potential between the top and bottomelectrodes, different from the first voltage potential, and generates asecond electric field different from the first electric field. Step 1516creates a second index of expansion in the first dielectric layer inresponse to the second electric field. In response to the second indexof expansion, Step 1518 creates a second average spacing betweenparticles in the first plasmonic layer. Step 1520 supplies a secondprimary color in response to second refractive index and second averagespacing.

In one aspect, providing the plasmonic device in Step 1502 includesproviding a plasmonic device with plasmonic particles made from anexpandable polymer material covered with a metal coating having a sizeresponsive to an electric field. Then, Step 1511 creates plasmonicparticles having a first average particle size in response the firstelectric field, and Step 1512 supplies the first primary color inresponse to the first refractive index, the first average spacing, andthe first average particle size.

Likewise, Step 1519 creates plasmonic particles having a second averageparticle size in response the second electric field, and Step 1520supplies the second primary color in response to the second refractiveindex, the second average spacing, and the second average particle size.

In a different aspect, Step 1522 sequentially accepts a first pluralityof voltage potentials between the top and bottom electrodes,sequentially generating a first plurality of electric fields. Step 1524sequentially creates a first plurality of expansion indexes in the firstdielectric layer in response to the first plurality of electric fields.In response to the first plurality of expansion indexes, Step 1526sequentially creates a first plurality of average spacings betweenparticles in the first plasmonic layer, and Step 1528 sequentiallysupplies a first plurality of primary colors in response to the firstplurality of refractive index and corresponding average spacings. Inanother aspect, Step 1527 sequentially creates plasmonic particleshaving a first plurality of average particle sizes in response the firstplurality of electric fields, and Step 1528 sequentially supplies thefirst plurality of primary colors in response to the first plurality ofrefractive indexes, the first plurality of average spacings, and thefirst plurality of average particle sizes.

A color-tunable plasmonic device using physical modulation mechanisms isprovided, along with an associated tuning method.

Examples of specific materials and structures have been used toillustrate the invention. However, the invention is not limited tomerely these examples. Other variations and embodiments of the inventionwill occur to those skilled in the art.

1. A plasmonic display device using physical modulation mechanisms, thedevice comprising: an electrically conductive bottom electrode; a firstdielectric layer overlying the bottom electrode, made from apiezoelectric material having an index of expansion responsive to anelectric field; an electrically conductive top electrode overlying thefirst dielectric layer; and, a first plasmonic layer including aplurality of discrete plasmonic particles, interposed between the topand bottom electrodes and in contact with the first dielectric layer. 2.The device of claim 1 wherein the first plasmonic layer is embedded inthe first dielectric layer.
 3. The device of claim 1 wherein the firstplasmonic layer overlies the bottom electrode; and, wherein the firstdielectric layer overlies the first plasmonic layer particles andexposed regions of the bottom electrode between the first plasmoniclayer particles.
 4. The device of claim 1 wherein the plasmonicparticles are an expandable polymer material covered with a metalcoating having a size responsive to an electric field.
 5. The device ofclaim 4 wherein the plasmonic particles have a first average size inresponse to a first electric field between the top and bottomelectrodes, and a second average size in response to a second electricfield.
 6. The device of claim 4 wherein the plasmonic particle polymermaterial is selected from a group consisting of BaTiO₃ andpolyvinylidene fluoride (PVDF).
 7. The device of claim 1 furthercomprising: a second dielectric layer overlying the first dielectriclayer, having a refractive index selected from a group consisting ofresponsive and non-responsive to an electric field.
 8. The device ofclaim 7 further comprising: a second plasmonic layer of plasmonicparticles interposed between the first and second dielectric layers. 9.The device of claim 1 wherein the bottom electrode is transparent to afirst range of wavelengths in the visible spectrum of light; and,wherein the top electrode is transparent to the first range of lightwavelengths.
 10. The device of claim 1 wherein the plasmonic particlesin the first plasmonic layer are arranged in an order selected from agroup consisting of random and a symmetrical array.
 11. The device ofclaim 1 wherein the plasmonic particles have a first average spacingbetween particles in response to a first electric field between the topand bottom electrodes, and a second average spacing between particles inresponse to a second electric field.
 12. The device of claim 1 whereinthe plasmonic particles in the first plasmonic layer comprise aplurality of different particle structures.
 13. The device of claim 1wherein the plasmonic particles in the first plasmonic layer comprise aplurality of different particle sizes.
 14. The device of claim 1 whereinthe plasmonic particles in the first plasmonic layer have a size in arange of 10 nanometers (nm) to 300 nm.
 15. The device of claim 1 whereinthe first dielectric is a material selected from a group consisting oflead zicronate titanate (PZT) and aluminum nitride (AlN).
 16. The deviceof claim 1 wherein the first dielectric material has a first index ofexpansion in response to a first electric field between the top andbottom electrodes, and a second index of expansion in response to asecond electric field. 17-21. (canceled)